Equipment SAMPLE FABRICATION Ion Miller Electron Beam Evaporator Chemical Vapor Deposition (CVD) Mask Aligner Field Emission Scanning Electron Microscope (FE-SEM) Atomic Layer Deposition (ALD) SEM with Energy Dispersive Spectrometer (EDS) Ion Sputter Coater OPTICS Microwave setup Main Terahertz time domain spectroscopy (THz-TDS) Setup Raman Spectroscopy and Time-Correlated Single-Photon Counting (TCSPC) setup High Power THz-TDS Setup