Equipment
SAMPLE FABRICATION

Ion Miller

Electron Beam Evaporator

Chemical Vapor Deposition (CVD)

Mask Aligner

Field Emission Scanning Electron Microscope (FE-SEM)

Atomic Layer Deposition (ALD)

SEM with Energy Dispersive Spectrometer (EDS)

Ion Sputter Coater
OPTICS

Microwave setup

Main Terahertz time domain spectroscopy (THz-TDS) Setup

Raman Spectroscopy and Time-Correlated Single-Photon Counting (TCSPC) setup
