Equipment

SAMPLE FABRICATION

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Ion Miller

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Electron Beam Evaporator

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Chemical Vapor Deposition (CVD)

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Mask Aligner

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Field Emission Scanning Electron Microscope (FE-SEM)

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Atomic Layer Deposition (ALD)

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SEM with Energy Dispersive Spectrometer (EDS)

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Ion Sputter Coater

OPTICS

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Microwave setup

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Main Terahertz time domain spectroscopy (THz-TDS) Setup

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Raman Spectroscopy and Time-Correlated Single-Photon Counting (TCSPC) setup

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High Power THz-TDS Setup